Enterprise Europe Network

The development and production of customized Micro-Electro-Mechanical Systems (MEMS)

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Partner keyword: 
Micro and Nanotechnology related to Electronics and Microelectronics
Microengineering and nanoengineering
Micromachining, nanomachining
Microassembly, nanoassembly
Micropositioning, nanopositioning
Customised semiconductors
Other analytical and scientific instrumentation
Micro- and Nanotechnology related to Biological sciences
Diagnostic services
Other Industrial Products (not elsewhere classified)
Manufacture of other electrical equipment
Other professional, scientific and technical activities n.e.c.


A Dutch SME develops and produces customized Micro-Electro-Mechanical Systems (MEMS) in small to medium volumes. Most important advantage is offering flexibility in design as well as in process. The SME is interested in commercial agreements with technical assistance to players in the Life Science and instrumentation markets, in particular Original Equipment Manufacturers and system integrators using MEMS in applications.



A Dutch SME is specialized in the development and small to medium volume production of customized Micro-Electro-Mechanical Systems (MEMS). The SME provides the customized MEMS solutions for Original Equipment Manufacturers (OEMs), system integrators and start-ups, from design to fully assembled modules.
The MEMS activities are driven by technology and as such projects are not focused on any particular market.

MEMS Technologies
The used MEMS technologies are based on quarantined process lines for ultra-clean processing, metal free processing and the in line processing of glasses, polymers and metals.
Examples of used technologies for different process steps are silicon on insulator, (deep) reactive ion (beam) etching, wafer bonding, release etch, bonding and etch back, metal encapsulation, dielectric capping, front to back side alignment, thin membranes, chemical mechanical polishing, surface micromachining, 100 millimeter wafers, wet etching, evaporation and sputtering, low pressure and plasma enhanced chemical vapour deposition and Ion implantation.

MEMS applications
A particular influx is experienced in the MEMS popular areas, such as bioMEMS, microfluidics, physical and chemical sensors, and opto-fluidics.
The SME is active in integrated photonics. Because of this expertise of the SME in integrated photonics value can be added to the functional design and production of opto-fluidic chips, in particular optical (bio)sensors. The SME can offer modules for fluorescence microscopy, deoxyribonucleic acid (DNA) sequencing, flow-cytometry and many more application that require the manipulation of light. The integrated photonics platform integrates well with microfluidic approaches and supports local functionalization of the surfaces. This allows further integration of (bio)sensors in lab-on-a-chip and flow chemistry applications.
Other areas with examples of MEMS activities are accelerometers, gyroscopes, flow sensors, pressure sensors, conductivity sensors, microphones, displays, beamers, adjustable mirrors, adjustable waveguides, inkjet printheads, inhalers, switches, tunable capacitors, coils, probetips used in atomic force microscopy, tunable interferometers, ring resonators and absorption sensors.

The SME is used to work closely with OEMs, system integrators and start-ups in product development projects and is interested in commercial agreements with technical assistance.
The Dutch SME enables easy access to the state of the art MEMS technologies and provides training on design tools, simulation tools, mask layout software, building blocks and design tools. In addition post processing can be offered on request like etching, packaging, glass bonding, fluidic connections and polishing.

The partner, OEM, system integrator or start-up, is desired to be a co-developer and to deliver the specifications for the functionalities of the MEMS and to be a co-developer. Also the partner is desired to operate in the Life Science and instrumentation markets.

Advantages & innovations

Cooperation plus value: 
Most important advantages and innovations are: • The development and production of customized MEMS • Flexibility in design as well as in process. • Because of the expertise in integrated photonics value can be added to the functional design and production of opto-fluidic chips, in particular optical (bio)sensors. • Prepared to leave the standard processing routes without losing the goal to achieve producible solutions. • Vast experience with different MEMS technologies and MEMS applications. • Vast experience with a variety of customers. Customers are multinationals, SME’s, start-ups and research institutions from all over the world operating in Life Sciences, instrumentation and industrial markets.

Stage of development

Cooperation stage dev stage: 
Already on the market

Partner sought

Cooperation area: 
Type of partner: Industry Partners: The desired partner(s) are Original Equipment Manufacturers (OEM), system integrators and start-ups interested to come to applications of MEMS. Role of the partner: The partner is desired to bring in the MEMS specifications and requirements for the application of the MEMS The Dutch SME offers the development tools, production and post processing of the MEMS.

Type and size

Cooperation task: 
SME 11-50,University,R&D Institution,SME <10,>500 MNE,251-500,SME 51-250,>500