Enterprise Europe Network

The development and production of high value high-end opto-mechatronic modules for the semiconductor industry

Country of origin:
Country: 
NETHERLANDS
Opportunity:
External Id: 
TONL20200611002
Published
11/06/2020
Last update
26/06/2020
Expiration date
27/06/2021

Keywords

Partner keyword: 
Micro and Nanotechnology related to Electronics and Microelectronics
Semiconductors
Micropositioning, nanopositioning
Apparatus Engineering
Optics
Semiconductor fabrication equipment and wafer products
Components testing equipment
Other electronics related equipment
Laser Related
Other industrial equipment and machinery
Machining
Manufacture of other fabricated metal products n.e.c.
Manufacture of other electrical equipment
Manufacture of other special-purpose machinery n.e.c.
Other manufacturing n.e.c.
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Summary

Summary: 
A Dutch SME develops and produces precision opto-mechanical modules for alignment, measurement and control, guidance and high precision parts for the semiconductor industry. Most important innovation is their expertise in co-developing and producing the optical modules, software included. The SME is interested in manufacturing agreements with technical assistance for transferring the know-how and technology to a main supplier or original equipment manufacturer in the semiconductor industry.

Description

Description: 

The Dutch SME specialises in the co-development and production of optical systems, assemblies, alignment systems and measurement and control equipment for the semiconductor industry. The development capability and high-quality engineering are recognised by renowned international companies in the semiconductor industry.

The Dutch SME always has invested in strategic knowledge, equipment and production facilities and carries out the comprehensive range of disciplines for high-end opto-mechatronics – or parts thereof – under one roof, including the associated software development.
All operations are carried out on machines that are capable of ensuring the closest possible tolerances, both for mechanical operations and surface treatments. If a new innovation becomes available, the Dutch SME has the capability to implement it immediately.

Examples of typical modules or products for the semiconductor industry are listed below.

Extreme Ultraviolet Source
• A system that aligns several laser sources to hit a Tin droplet at the same instant to generate an extreme ultraviolet source.

Alignment tools
• An alignment tool ensuring that products can be re-loaded into a scanner at the exact some position as it was positioned in the scanner for the first time.
• An alignment reticle for a semiconductor device.
• A metrology instrument, incorporating mechanics, optics and electronics, for accurate measurement and control of the position of the central laser beam.

Laser guiding systems
• A corner cube, that is a component for guiding laser light inside a semiconductor device.
• A laser beam assy for transporting laser light in a semiconductor device.

Sensors
• A sensor for laser beam intensity.

Extremely high precision metal parts
• A shock absorber to ensure that a motor in semiconductor equipment operates without vibration.
• A vacuum piston that is glued in a glass base (a thrust bearing).

Vision system
• A disruptive vision system that sharply images 3 dimensional objects with fines detail and the highest speed. By combining a unique optical design and intelligent algorithms, the vision system extends the depth of field over 10 times compared to traditional vision systems, without loss of resolution or imaging speed.

The Dutch SME is interested in a manufacturing agreement with technical assistance . for transferring the know-how, instruments, modules or parts thereof. The associated software development is included. The company is aiming to cover a large part of the value chain.

The typical role of the Dutch SME is co-design, industrialization of the opto-mechatronic module, (complex) machining, surface treatment, optical aligning, cleanroom assembly, testing, qualification and serial production of the opto-mechatronic module, with corresponding software included.

The desired partners are system integrators, main suppliers or original equipment manufacturers (OEMs) for the semiconductor industry. The partner is expected to deliver the concept specifications, to be a co-developer and to deliver the final test specifications.

Advantages & innovations

Cooperation plus value: 
Most important advantages and innovations are: • An extensive knowledge about the industrialization and the manufacturability of knowledge intensive high value high-tech opto-mechatronic based instruments, including the associated software development. • A vast experience in developing and perfecting prototypes and preparing for and launching series production. • A team of highly trained employees that are used to think in micrometres, high accuracy and quality. • The most updated production facilities that can process special exotic materials. • The expertise on optomechanical tolerance analysis and precision gluing of optical instruments. • The expertise on the assembly of modules in clean rooms, internal pre-qualification and testing. • The ability to maintain the quality of the optomechanical module at the very highest level and meet highest standards in the semiconductor industry. • The lower total cost of ownership, the development capability and high quality engineering and production of the modules by the SME are recognised by renowned international companies.

Stage of development

Cooperation stage dev stage: 
Already on the market

Partner sought

Cooperation area: 
Type of partner: Industry Partners: Systems integrators, main suppliers or original equipment manufacturers in the semiconductor industry using optomechatronic instruments, modules or parts thereof. The desired partner(s) should be interested in a cost effective, robust, high quality, high accurate optomechatronic based applications. Role of the partner: The partner is desired to give input for the development and application of the optomechatronic instrument, module or parts thereof. The Dutch SME is interested in a manufacturing agreement with technical assistance for the co-development and production of the optomechatronic instrument, module or parts thereof. The associated software will be developed and also training, maintenance and services are part of the agreement.

Type and size

Cooperation task: 
R&D Institution,251-500,>500