Slovak scientific and research institute, established in 1990, has developed a novel probe for realization of local charge transient analysis.
The presented invention refers to a specific probe and method of
realization of scanning probe microscopy, namely scanning transient microscopy, using a charge transient spectroscopy for the analysis of materials at microscopic level. Deficiencies of present devices for scanning probe microscopy solves the novel way of controlling the microscope’s probe, the advantage of which is that it allows microscopic analysis of defects by transient spectroscopy also in low conductive semiconductor and dielectric films. Another advantage is that the probe is not in contact with the analysed surface, does not damage it and at the same time does not wear out. Method of implementation of local charge transient analysis by the probe of the scanning transient microscope is characterized by that the probe is placed and moved in short distance from imaged surface, in the selected point the appropriate distance of the sensor from the surface is
set, the power supply for controlling the distance of the probe from the surface is switched off, the local charge transient spectroscopic analysis is carried out, and next the power supply of the probe for controlling the distance of the probe from the surface is switched-on. Reliable analysis of transients is made possible by separation of analysed transient current from current powering the sensor for the control of probe distance from the
surface, namely by separation of the step of setting the position of the probe from the step of quantity measurement. The advantage of the presented solution is that it allows the
connection of probe, formed by a miniature resonator with attached tip sensing the analysed variable, to the broadband amplifier without a need of an additional lead, which would complicate the realization of the probe and reduce its mechanical quality factor, and thus the sensitivity of sensing the
interaction with the surface. Local charge transient analysis is carried out after setting the probe tip to selected distance from the surface, sensed by the resonator.
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