A team of breeders from the Slovak research institute has developed a piezoelectric pressure sensor. based on GaN material substrate, intended to operate in extreme conditions of high temperature and chemically aggressive environment, with high electron mobility transistor (HEMT) as sensing element.
Solution of the MEMS pressure sensor according to this unique invention consists in arranging of the C-HEMT sensing element as a circularly symmetrical HEMT functioning as piezoelectric pressure sensor directly into thin circularly symmetrical or asymmetrical AlGaN/GaN membrane, on which the pressure change will be applied and subsequently the amount of generated charge will be measured on at least two Schottky gate sensing electrodes.
Extreme operating conditions are frequent in the aerospace and automotive industries as well as in other industries and the quality of production and operation depends on the accurate measurement of pressure. Measuring high pressures at high temperatures and in chemically aggressive environments entails problems with the stability of the measuring system, transmission and evaluation of the signal.
A solution to these problems is afforded by the pressure sensor that has been developed by a team of inventors from the Institute of Electrical Engineering of the Slovak Academy of Sciences. The sensor is a unique pressure sensor using the concept of a micro-electro-mechanical system (MEMS) for measuring external pressure on the basis of a piezoelectric, semiconductor AlGaN/GaN material system, which is capable of functioning under extreme conditions involving high temperatures (up to 700 ° C) and chemically aggressive environment.
The sensor makes possible the miniaturization of dimensions, the increase in sensing quality and resistance. The monolithic integration of the sensoric part (diaphragm) and control electronics into a single chip in combination with high temperature and chemical resistance means that the sensor can operate directly in the harsh environment. The sensor requires no electrical power and, with its greater durability and the financial savings related to it, its exceptional mechanical properties and extreme sensitivity, surpasses the commonly used sensor (up to 2000-fold increase in sensitivity over conductivity types of sensors).
The pressure sensors have a wide range of uses. Applications can be found, in particular, in the automotive and aerospace industries, in medicine, in consumer electronics and in the high-pressure treatment of materials.
Furthermore, for manufacturers of common pressure sensors with a well-developed technological infrastructure, the requirements associated with the switch to the production of the pressure sensor are almost zero.
The institute is looking for partners to cooperate with via financial agreement or license agreement.